Automated Semiconductor Inspection Microscope MX61A
Discontinued Products
Overview
This product has been discontinued, check out our current semiconductor inspection microscopes >>
The MX61A is a specially designed semiconductor microscope that allows operators to work in an ergonomically correct position and benefit from smoother operation throughout extended inspection periods, maximizing productivity and integration.
- Superior Optics
- Integrated Control of Motorized Components
- Ergonomic Design Features
- Complimentary Inspection Solutions
Superior Optics
High-level Imaging Performance
The best in imaging performance has been improved through the introduction of the new UIS2 optical system employed by the MX61A. Clear, crisp, true color images are evident in all illumination techniques including brightfield, darkfield and differential interference contrast (DIC). The MX61A's darkfield observation image brightness has increased by an average of four times as compared with the previous Olympus UIS optical series.
| Example Observation Images | ||
 Brightfield |  New Darkfield |  Conventional |
> Click here for details about UIS2 objective lenses
Optimized Contrast by Automatic Aperture Control
 Aperture Stop Control | The integrated motorized aperture stop automatically adjusts for the objective lens in use. Thus the best image quality for every magnification is achieved, making routine inspections more comfortable for the eyes and more efficient for the operator. |
Active Laser Autofocus
 Autofocus with High-magnification Lenses | The MX61A is equipped with an active laser auto focus unit that improves the accuracy and speed of inspections. The introduction of a newly developed multi-spot sensor enables a substantial increase in stability by eliminating the effects of vertical topography on the specimen, exceeds expectations in all observation methods, even faster and more repeatable. |
Supports Routine and Advanced Observation Methods
 Objective Lens UIS2 Series | The UIS2 objective lens series provides high performance imaging in deep ultraviolet, visible light and near-infrared microscopy. The MX61A is compatible with all UIS2 objectives making Brightfield, Darkfield, Differential Interference Contrast, Fluorescence and Near-Infrared observations available on one system easily selected through the integrated software platform or handset. |
| Example Observation Images | ||
 Brightfield |  Darkfield |  Differential Interference Contrast |
 Fluorescence |  Comparison between Near-infrared Light (left) and Visible Light (right) | |
Integrated Control of Motorized Components
Integrated Control of Motorized Components
 Integrated Microscope and Software System | Olympus offers several software platforms that fully integrate with the MX61A microscope frame to control all motorized functions including the digital camera and motorized stage. Each interface is specifically designed for basic inspection and control, advanced image analysis or repetitive site inspection and defect review. > Click here for Olympus' lineup of digital cameras |
Ergonomic Design Features
Compliant with SEMI S2 & S8 Standards
The MX61A is manufactured in accordance to SEMI (Semiconductor Equipment and Materials International) S2 and S8 standards for wafer safety and ergonomics and is also CE marked.
Tilting Observation Tube
 Tilting Observation Tube | The extensive range of the tilting observation tube allows the operator to sit at the microscope using the proper posture ensuring reliable and comfortable operation. |
Increased Inspection Speed with Motorized Nosepieces
 Motorized Nosepieces | The rotational speed of the motorized nosepiece ultra-fast, decreasing time between inspections while maintaining clean room compatibility. Olympus offers three variations for desired inspection methods controlled via software, frame button or independent handset. |
Rigid Frame Design
 High-magnification Observation Image | Olympus has adopted a highly rigid, vibration-sensitive design to its MX61A frame in order to minimize blurring due to vibration, maximizing the image resolution and contrast, beneficial when using 100x or 150x objective lenses. |
Handset for Tactile Control
 Handset | An ergonomically designed handset allows push-button control for the motorized funtions of the microscope such as selecting the objective lens and observation techniques. The operator can also switch between TRACE and ONE SHOT control of the auto focus unit, manually fine focus, adjust the retardation position in DIC, lamp intensity and lower the stage for sample exchange. |
Complimentary Inspection Solutions
High Performance Motorized Stages
 Motorized Stage | Highly accurate motorized stages are available with the MX61A microscope. Motorized stages with joystick and software controls make inspections repeatable and ergonomic for extended inspection times. |