We used novel manufacturing technology to create objective lenses with simultaneously improved numerical aperture, working distance, and image flatness. Their high numerical aperture (NA) and 3 mm working distance improves field of view and image quality from the center to the edge, enabling greater throughput in automated semiconductor inspection. 20X and 50X brightfield lenses are available. |
MXPLFLN50X
The MXPLFLN50X is our first 50X objective with a 0.8 numerical aperture and 3 mm working distance. Compared to a LMPLFLN100X objective, the field of view is four times greater thanks to the 0.8 NA at 50X magnification.
MXPLFLN20X
The MXPLFLN20X is our first 20X objective with a 0.6 numerical aperture and 3 mm working distance. Its high NA and high image flatness produces homogenous images that are ideal for stitching.
Magnification [X] | 20 |
---|---|
Numerical aperture (NA) | 0.6 |
Working distance (WD) [mm] | 3 |
Objective field number | 26.5 |
Immersion medium | Air/dry |
Spring loaded | N/A |
Correction collar | N/A |
Correction range of correction collar | N/A |
Iris | N/A |
Correction level of chromatic aberration | Semi-apochromat (FL) |
Parfocalizing distance [mm] | 45 |
Back focal plane (BFP) position | -8.0 |
Type of screw thread | W20.32 × 0.706 (RMS) |
Brightfield (Reflected) | Good |
Brightfield (Transmitted) | Good |
Darkfield (Reflected) | N/A |
Darkfield (Transmitted) | N/A |
DIC (Reflected) | Good |
DIC (Transmitted) | N/A |
Phase contrast | N/A |
Relief contrast | N/A |
Polarized light | Limitation |
Fluorescence (B, G excitation) | Good |
UV fluorescence (at 365 nm) | N/A |
Multiphoton | N/A |
TIRF | N/A |
IR | N/A |
WLI | N/A |
Auto focus | Good |
Magnification [X] | 50 |
---|---|
Numerical aperture (NA) | 0.8 |
Working distance (WD) [mm] | 3 |
Objective field number | 26.5 |
Immersion medium | Air/dry |
Spring loaded | N/A |
Correction collar | N/A |
Correction range of correction collar | N/A |
Iris | N/A |
Correction level of chromatic aberration | Semi-apochromat (FL) |
Parfocalizing distance [mm] | 45 |
Back focal plane (BFP) position | -8.0 |
Type of screw thread | W20.32 × 0.706 (RMS) |
Brightfield (Reflected) | Good |
Brightfield (Transmitted) | Good |
Darkfield (Reflected) | N/A |
Darkfield (Transmitted) | N/A |
DIC (Reflected) | Good |
DIC (Transmitted) | N/A |
Phase contrast | N/A |
Relief contrast | N/A |
Polarized light | Limitation |
Fluorescence (B, G excitation) | Good |
UV fluorescence (at 365 nm) | Good |
Multiphoton | N/A |
TIRF | N/A |
IR | N/A |
WLI | N/A |
Auto focus | Good |
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