The BXC series offers high-quality microscope components that suppress variations and provide stable imaging quality. These compact microscope assemblies can be quickly and easily integrated into your system with a variety of options. Please download the information necessary for device integration from our BXC series resource center.
High-Performance Objective Lenses
Combined high numerical aperture and long working distance
Objective lenses are crucial to a microscope’s performance. The MXPLFLN objectives add depth to the MPLFLN series for epi-illumination imaging by maximizing numerical aperture and working distance at the same time. Higher resolutions at 20X and 50X magnifications typically mean shorter working distances, which forces the sample or objective to be retracted during sample exchange and requires slow sample handling during observation. In many cases, the
MXPLFLN series’ 3 mm working distance eliminates this problem, enabling faster inspections with less chance of the objective hitting the sample.
The image flatness of the MPLFLN 2.5X, 5X, and 5X brightfield/ darkfield objectives has been improved, making it faster to obtain stitched images at low magnifications. For higher throughput in darkfield observation, we introduced a brightfield/darkfield 2.5X objective—the MPLFLN2.5XBD.
Broad spectral range
From visible to near-infrared (NIR), our advanced optical fabrication and coating technology provides users and manufacturers with a variety of objective lens and tube lens combinations to simplify their system requirements with standard products.
Transmittance curves of three available objectives
Wavefront aberration control
High-end manufacturing processes—such as wavefront aberration-controlled selection of lens assemblies—are used for MXPLFLN series objectives. This process keeps variation in device performance to a minimum.
Form the optimal image
Select from five tube lenses to meet a variety of applications.
Part of our BX™ microscope series, the BXC series has a wide range of options for each part, including the objective lens, revolving nosepieces, and Illuminators. The series is designed to let you to choose freely according to your use case. The versatility and modularity of these components make them a good choice for inspection or imaging applications, such as instruments designed for wafer alignment, bump measurement, and image stitching.
BXC Series Configuration Examples
BX53M
BXC-CBRML system
BXC-CBB system
Conventional microscope
Entry
Save space with only one BF objective
Versatile
Basic, compact assemblies
Advanced
Fully motorized assemblies for clean rooms
Darkfield is used to observe scattered or diffracted light from a sample—such as scratches or flaws—on a mirror surface or semiconductor wafer. The MIX slider realizes darkfield without large, dedicated optics and enhances traditional darkfield with 16 individually controllable LEDs, enabling you to control the direction of light shining on the sample. In addition, this directional darkfield technique, achieved by using the MIX slider, can be combined with
brightfield, simple polarized light, or fluorescence observation.
MIX slider (top side)
U-MIXR-2
MIX slider ((bottom side)
U-MIXR-2
Darkfield
MIX with brightfield
Wide variety of revolving nosepieces
As the demand for automation increases, so does the demand for motorized revolving nosepieces. Evident has proven performance with the U-D5BDREMC and U-D6BDREMC five-and six-position motorized revolving nosepieces. Now the U-D5BDREMC-VA class 1 clean room compatible motorized revolving nosepiece removes dust and other particles using a vacuum. Manual, coded, and centerable revolving nosepiece as well as adapters for a single objective lens can be configured into
BXC assemblies.
Motorized BD revolving nosepiece with vacuum function U-D5BDREMC-VA
Measurement objective adapter STM7-MMOBAD
Autofocus sensing unit
The BXC-FSU is a Class 1 laser product1 to enable active multispot sensing to monitor the direction of the focal position and focus status. This sensor works well for low-contrast samples like bare wafers. A unique algorithm outputs a stable focus signal regardless of the objective lens magnification and noise caused by peripheral light. The command reference manual, instruction manual, and sample software are available on our website.2
1 The Class 1 laser is contained, so no additional safety measures are required.
2 Application manuals are available on request.
Autofocus Sensing Unit BXC-FSU
Compact control box
The BXC-CBRML and BXC-CBB control boxes have small footprints, no fan, and variable mounting options (e.g., wall or ceiling). Depending on the control box, functions like the MIX slider, illuminator, motorized revolving nosepiece, and LED light source can be integrated and controlled using your software.
Learn More
We offer a full range of resources to support our OEM customers. Click here to visit our OEM resources page where you'll find brochures, manuals, software downloads, and other helpful content.
Control box BXC-CBRML
Wall control box
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