See the Details
Get clear images at high magnification with no complicated sample preparation.
1100x magnification
Sample: IC patterns on a semiconductor wafer
See the fine IC patterns and tiny defects on a wafer with sharp detail.
【Sample Application】 
Semiconductor bear wafer lasermark
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| Observed sample 
Semiconductor wafer |
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Switch Observation Techniques with One Click
With a single click, you can change between five observation methods for maximum flexibility.
Darkfield observation
Sample: An IC chip on a UV sensor
Observe metal parts such as bonding wires and lead frames.
Brightfield observation
Sample: An IC chip on a UV sensor
The IC chip's pattern can be observed with a crisp image.
MIX observation (darkfield + brightfield)
Sample: An IC chip on a UV sensor
The IC chip and metal parts can be viewed at the same time by combining brightfield and darkfield images.
【Sample Application】 
Contaminants in Printed circuit board through-holes
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| Observed sample 
UV sensor |
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3D Images
View your sample in three dimensions from any angle.
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Sample: pins on a printed circuit board
View the shape of projecting pins in 3D.
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【Sample Application】 
Detecting flaws in heat-treated aluminum alloy parts
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| Observed sample 
Printed circuit board |
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Measure Complex Shapes in Real Time
Using 3D measurement, a DSX microscope can instantly measure complex shapes and points that are difficult to approach.
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Sample: MEMS
Small gaps on the MEMS can be measured from any direction in real time.
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【Sample Application】 
Sectioning analysis for ball grid array
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| Observed sample 
MEMS |
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